The mems devices produced by the micro electro mechanical system ( mems ) technology not only had the volume to be small , the function integration characteristic , moreover enhanced the use reliability , reduced the cost , which is very important for the fields of advanced technology 采用微机械加工技术制造出的mems器件不但具有体积微小化、功能集成化的特点,而且提高了使用的可靠性,降低了成本,这对于许多高新技术领域具有重要意义。
Micro - channel electrophoresis chip ( mce chip ) system is a newly developed research field . the micro - channel network on the chip is manufactured by the technology of micro opto electro mechanical system ( moems ) on the substrate of glass , fused silica , pdms etc . sample separation is performed in the micro - channel and detected by opticcal or chemical methods 微通道电泳芯片( micro - channelelectrophoresischip , mcechip )系统是利用微光机电系统( moems )技术在玻璃、石英、有机聚合物等基片上刻蚀出预设计好的微通道网络，并在其中进行样品的电泳分离，利用光学或化学等方法进行检测。
And the theory of the finite element method , the orthogonal test method , and the regressive interpolation are described in chapter three . in chapter four , a new 3 dof micro - displacement systems was brought out based on the analysis of the research results in the area of the multi - dof micro - displacement electro mechanical systems 第三章对有限元计算方法、正交试验及回归分析方法的基本原理和试验方法作了简单的阐述，建立起相关的数学模型，为柔性铰链的设计和微动台的设计提供理论依据。
Tangshan beihua electro mechanical engineering co . , ltd was established in jan . of 1990 , which is a hi tech private limited company . it ' s a member of tangshan science and technology committee . main products includes electro mechanical integrated bulk conveying plants serving industries of power generation , cement , mining , chemical , iron & steel , harbor , coal handling , food processing , providing " turn key " projects from products designing , production , installation and after - sales services 唐山市北华机电工程有限公司(以下简称北华机电)成立于1990年1月，上级主管部门是唐山市科学技术委员会，属省级科技型民营企业，主要产品有电力、水泥、矿山、化工、钢铁、港口、煤炭、食品等行业的机电一体化成套散料输送设备，从产品开发、设计、生产制造、安装、售后服务，可提供一条龙服务，即所谓“交钥匙工程” ，属机电制造业。
Based on capillary electrophoresis ( ce ) , mce chip is a multidisciplinary technology , which has roots in micro opto electro mechanical system ( moems ) , biochemistry and analytical chemistry . it became a new platform in the field of analytical chemistry , especially in the life science , drug discovery and medicine 它是毛细管电泳技术和微光机电系统、生物化学、分析化学等多学科的交叉，为分离分析领域提供了一种全新的技术平台，已经开始在生命科学、药物化学、医学等领域得到应用。
